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99.7% Alumina Ceramic Nozzle Insulator For Semiconductor Implant Equipment

Shengda Ceramic provide all kinds of 99.7% Alumina Ceramic Nozzle Insulator For Semiconductor Implant Equipment

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Product Introduction

99.7% Alumina Ceramic Nozzle Insulator For Semiconductor Implant Equipment

Product Overview

Our 99.7% high-purity alumina ceramic nozzle insulators are precisely sintered and ultra-precision machined, specially developed for semiconductor ion implantation equipment. They deliver exceptional electrical insulation, ultra-low particle shedding, outstanding high-temperature stability and superior plasma resistance, perfectly adapting to ultra-clean high-vacuum working environments. Full custom dimensions and tight tolerance services are available to match diverse OEM equipment assembly demands.

Key Technical Specifications

✅ Material: 99.7% High Purity Alumina (Al₂O₃), metallic impurities below 50ppm

✅ Density: 3.9 g/cm³, fully dense gas-tight structure

✅ Flexural Strength: 350-400 MPa, excellent structural stability

✅ Hardness: 1500 HV (Mohs 9), superior wear and erosion resistance

✅ Max Continuous Operating Temperature: 1600°C (2912°F)

✅ Thermal Shock Resistance: ΔT＞500°C, resistant to drastic temperature changes

✅ Insulation Performance: High volume resistivity, reliable high-voltage insulation

✅ Surface Finish: Precision ground Ra 0.4μm, optional super polishing Ra＜0.1μm

✅ Dimensional Tolerance: Strict ±0.02mm machining accuracy

✅ Customization: Various inner/outer diameter and length specifications supported

Industry Applications

1. Semiconductor Ion Implantation Equipment

Core nozzle insulation parts, beam path insulating components, vacuum cavity isolation fittings, effectively isolate high voltage current and avoid discharge interference.

2. Wafer Fabrication Process

Ultra-clean process insulation accessories, zero contamination, compatible with high-purity semiconductor production standards.

3. High-Vacuum Electronic Equipment

Vacuum chamber insulating nozzles, high-frequency insulating structural parts, stable performance under long-term vacuum environment.

4. Plasma Processing Systems

Plasma shielding insulators, resist plasma corrosion, extend equipment service cycle greatly.

5. Precision Electronic Manufacturing

High-purity insulating positioning components, non-magnetic design, suitable for high-precision chip production facilities.

99.7% Alumina Ceramic Nozzle Insulator For Semiconductor Implant Equipment

Technical Parameters

Properties	Units	Steatite Ceramic	Cordierite Ceramic	Mullite Ceramic	95% Al2O3	99% Al2O3	Zirconia Ceramic	Silicon Nitride
Colour		White	Yellow	White	White	Ivory	White	Grey
Density	g/cm3	2.7	1.9	2.6	3.5	3.85	6	3.2
Flexural Strength	Mpa	140	30	120	280	340	1150	600
Compressive Strength	MPa	900	350	500	2100	2200	2500	2500
Max Use Temperature	°C	1000	1200	1300	1400	1650	1500	1800
Thermal Condutivity	W(m.K)	2~3	1.3~1.8	2~6	16~28	19~30	2.5	20
Thermal Expansion Cofficient	10-6/°C	7 ~ 9	1.5~3.5	5~6	6.5~7.5	6~8	8~10	3~4
ThermalShock Resistance	△TC	100	300	150	140	150	250	600
Specific Heat	J/kg.K	850	800	900	950	950	500	500
Dielectric Strength	KV/mm	20	—	30	12	10	5	20
Dielectric Constant	Er	6	—	8	9	9	12	6

Production process

Certifications

Precision CNC Alumina Ceramic Setter Flat Plate

Our advantage

● Certificates: ISO & SGS

● OEM & ODM: OEM & ODM service is available

● Strict testing procedures :Meeting the requirements of the product design and process, providing reliable testing data.

● Short Delivery time:If less than 1000 pieces, it only takes around 5 days. We also stock some standard-sized products, if you need urgently, we can delivery very soon.

● Best ex-factory price

● Worldwide customers

● Customized according to needs

● Continuous research and development of new products

● Customer service:If you find some quality problem, please contact us, we’ll deal with it as soon as possible.

Packaging and shipping

Precision CNC Alumina Ceramic Setter Flat Plate

Our customers have a wide range of processing choices for transportation mode.

Precision CNC Alumina Ceramic Setter Flat Plate

Our Main Products

Precision CNC Alumina Ceramic Setter Flat Plate

Company Profie

Yixing Shengda Refractory Ceramic Co., Ltd, established in 1995, Yixing, China with an area of 4,000 square meters and fixed assets of over 1 million US dollars, is a professional manufacturer of Steatite Ceramic Parts, Alumina Ceramic Parts, Cordierite Ceramic Parts, Ceramic Band Heater Insulators, Ceramic Terminal Block, Thermostat Ceramic Parts, Zirconia Ceramics Parts, Ceramic Heater Plugs, etc.

Shengda Ceramic equipped with CAD/CAXA/Solidworks software to provide professional OEM & ODM service.

Looking forward to co-operating with the customers from all over the world!

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